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Product name Manufacturer Model Process Inch Vintage Other remarks
AMAT ENDURA DEPOSITION
ANELVA C-7730FH DEPOSITION 4 2003
ULVAC SIV-500 DEPOSITION 6 2016
ULVAC SRH-420MC DEPOSITION 6
YAMATO V1000X ETCHER 4
PLASMA‐THERM Versaline ICP ETCHER 8
ULVAC CD-300R ETCHER 2~6
SEMITOOL SAT ETCHER 4~8
SEMITOOL SST ETCHER 4~8
ULVAC NE-5500 ETCHER 3
VARIAN 160XP 6
VARIAN E-220 6 1995
OEM SRD800 CLEAN 4 2019
OEM SRD200 CLEAN 4 2019
VERSATILE ST270 CLEAN 4

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