中古設備・零件庫存搜尋

Areas of Application

•　For cleaning and drying of all current types of FOUP ́s and FOSB ́s

Features

•　Front side operation

•　Swivel arm for inside FOUP cleaning

•　Optimized turntable and insert-cage

•　PLC controller with 12” colour touch

•　Variable data input (temperature,

　  time, speed, parameter, etc.)

•　HEPA-filtered air inlet from the top

•　Fan-unit with adjustable speed

　  for standby and process model

•　Unbalanced sensor control

　  for automatic shut-off

Benefits

•　Easy move-in due to modular design

•　Fast installation, hook-up and start-up

•　Excellent cleaning & drying performance

•　Warm air for drying (HEPA-filtered)

•　One operator can handle multiple

　  systems simultaneausly

•　Easy to load and unload

•　Low cost of ownership

Process

Application

Cleaning

Drying

2,000 mm x 1,850 mm x 2,700 mm (length x width x height)

Housing in 2 parts, reduced move-in height 2,250 mm

Facility

requirements

Electricity 400 VAC, 50-60 Hz, 24 kW, IN 35 A

Hot water supply 25 l per minute at 60-70 °C

Exhaust 800 m³/h, 500 Pa

CDA 6 bar, N2 3 bar, Noise level ~ 65 dbA

Housing according FM4910

Detergence tank with dosing pump, volume approx. 5 liters

Humidity sensor for drying

Adapter kit for additional parts (cassettes, reticles, etc.)

SECS II GEM Interface

RFID or barcode reading

Second touch panel on the backside for two door system

Ionization unit

External inline-heater 120 kW